A Procedure for Cross Sectioning Specific Semiconductor Devices for both SEM and TEM Analysis

A Procedure for Cross Sectioning Specific Semiconductor Devices for both SEM and TEM Analysis

Author(s):

Publication title:

Specimen preparation for transmission electron microscopy of materials--II : symposium held April 19-20, 1990, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

199

Pub. Year:

1990

Page(from):

189

Page(to):

204

Pages:

16

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990883 [1558990887]

Language:

English

Call no.:

M23500/199

Type:

Conference Proceedings

Details

TDL ID:	ZA00015683
Series ID:	PA00000011
Conf. info. (Name):	Symposium on specimen preparation for transmission electron microscopy of materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1990.04.19-1990.04.20

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