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THE ROLE OF THE SPECIES FORMED IN PECVD SYSTEMS ON THE DENSITY OF STATES OF a-Si:H FILMS

Author(s):
Martinz, R.
Rodriguez, L.
Vieira, M.
Fortunato, E.
Santos, M.
Dirani, E.
Carvalho, N.
Baia, I.
Guimaraes, L.
4 more
Publication title:
Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
192
Pub. Year:
1990
Page(from):
175
Page(to):
180
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990814 [155899081X]
Language:
English
Call no.:
M23500/192
Type:
Conference Proceedings

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