PROCESSING OF SILICON WAFERS FOLLOWED BY MICROWAVE PHOTOCONDUCTIVITY MEASUREMENTS

PROCESSING OF SILICON WAFERS FOLLOWED BY MICROWAVE PHOTOCONDUCTIVITY MEASUREMENTS

Author(s):

Publication title:

Microwave processing of materials II : symposium held April 17-20, 1990, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

189

Pub. Year:

1991

Page(from):

403

Page(to):

410

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990784 [155899078X]

Language:

English

Call no.:

M23500/189

Type:

Conference Proceedings

Details

TDL ID:	ZA00015673
Series ID:	PA00000011
Conf. info. (Name):	Symposium on microwave processing of materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1990.04.17-1990.04.20

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