X-RAY STRESS STUDIES OF PASSIVATED AND UNPASSIVATED NARROW ALUMINUM METALLIZATIONS

X-RAY STRESS STUDIES OF PASSIVATED AND UNPASSIVATED NARROW ALUMINUM METALLIZATIONS

Author(s):

Publication title:

Thin films : stresses and mechanical properties II : symposium held April 16-19, 1990, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

188

Pub. Year:

1990

Page(from):

153

Page(to):

158

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990777 [1558990771]

Language:

English

Call no.:

M23500/188

Type:

Conference Proceedings

Details

TDL ID:	ZA00015672
Series ID:	PA00000011
Conf. info. (Name):	Symposium on thin films
Conf. info. (Number):	2nd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1990.04.16-1990.04.19

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