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COMPOSITION AND STRUCTURE CHARACTERIZATION OF WNx FILMS PRODUCED BY RF REACTIVE SPUTTERING

Author(s):
Publication title:
Thin film structures and phase stability : symposium held April 16-17, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
187
Pub. Year:
1990
Page(from):
161
Page(to):
166
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990760 [1558990763]
Language:
English
Call no.:
M23500/187
Type:
Conference Proceedings

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