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CMOS POLYSILICON THIN FILM TRANSISTORS WITH SIMULTANEOUSLY DEPOSITED LAYERS FOR SOURCE-DRAIN AND GATE

Author(s):
Huang, T. Y.
Tsai, C. C.
Wu, I. W.
Lewis, A. G.
Chiang, A.
Bruce, R. H.
1 more
Publication title:
Polysilicon thin films and interfaces
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
182
Pub. Year:
1990
Page(from):
375
Page(to):
380
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990715 [1558990712]
Language:
English
Call no.:
M23500/182
Type:
Conference Proceedings

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