LOW STRESS SILICON NITRIDE AND POLYSILICON FILMS FOR MICROMACHINING APPLICATIONS
- Author(s):
- Publication title:
- Polysilicon thin films and interfaces
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 182
- Pub. Year:
- 1990
- Page(from):
- 207
- Page(to):
- 212
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990715 [1558990712]
- Language:
- English
- Call no.:
- M23500/182
- Type:
- Conference Proceedings
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