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TiSi2 THIN FILMS FORMED ON CRYSTALLINE AND AMORPHOUS SILICON

Author(s):
Xiao, Z. G.
Jiang, H.
Honeycutt, J.
Osborn, C. M.
McGUire, G.
Rozgonyi, G. A.
1 more
Publication title:
Polysilicon thin films and interfaces
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
182
Pub. Year:
1990
Page(from):
65
Page(to):
70
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990715 [1558990712]
Language:
English
Call no.:
M23500/182
Type:
Conference Proceedings

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