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RBS ANALYSIS OF INTERMIXING IN ANNEALED SAMPLES OF Pt/Ti/III-V SEHICONDUCTORS

Author(s):
Savin, W.
Weir, B. E.
Katz, A.
Chu, S. N. G.
Nakahara, S.
Harris, D. W.
1 more
Publication title:
Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
181
Pub. Year:
1990
Page(from):
227
Page(to):
232
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990708 [1558990704]
Language:
English
Call no.:
M23500/181
Type:
Conference Proceedings

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