BLANKET AND SELECTIVE COPPER CVD FROM Cu(FOD)2 FOR MULTILEVEL METALLIZATION

BLANKET AND SELECTIVE COPPER CVD FROM Cu(FOD)2 FOR MULTILEVEL METALLIZATION

Author(s):

Publication title:

Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

181

Pub. Year:

1990

Page(from):

79

Page(to):

84

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990708 [1558990704]

Language:

English

Call no.:

M23500/181

Type:

Conference Proceedings

Details

TDL ID:	ZA00015665
Series ID:	PA00000011
Conf. info. (Name):	Symposium on advanced metallizations in microelectronics
Conf. info. (Number):	1990
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1990.04.16-1990.04.20

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