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EFFECT OF NITROUS OXIDE GAS ON CVD DIAMOND FILM DEPOSITION

Author(s):
Koinuma, H.
Yoshimoto, M.
Takagi, Y.
Sawaoka, A. B.
Hashimoto, T.
Nagai, T.
Shiraishi, T.
2 more
Publication title:
Better ceramics through chemistry IV : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
180
Pub. Year:
1990
Page(from):
861
Page(to):
864
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990692 [1558990690]
Language:
English
Call no.:
M23500/180
Type:
Conference Proceedings

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