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NEUTRON DEPTH PROFILES OF BORON IMPLANTED SEMICONDUCTORS

Author(s):
Publication title:
Neutron scattering for materials science : symposium held November 27-30, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
166
Pub. Year:
1990
Page(from):
331
Page(to):
336
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990548 [1558990542]
Language:
English
Call no.:
M23500/166
Type:
Conference Proceedings

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