*THE MEASUREMENT OF BORON AT SILICON WAFER SURFACES BY NEUTRON DEPTH PROFILING

*THE MEASUREMENT OF BORON AT SILICON WAFER SURFACES BY NEUTRON DEPTH PROFILING

Author(s):

Publication title:

Neutron scattering for materials science : symposium held November 27-30, 1989, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

166

Pub. Year:

1990

Page(from):

323

Page(to):

330

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990548 [1558990542]

Language:

English

Call no.:

M23500/166

Type:

Conference Proceedings

Details

TDL ID:	ZA00015650
Series ID:	PA00000011
Conf. info. (Name):	Symposium on neutron scattering for materials science
Conf. info. (Number):	1989
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1989.11.27-1989.1130

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