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DOPANT SEGREGATION AT POLYCRYSTALLINE SILICON GRAIN BOUNDARIES IN DEVICE FABRICATION PROCESSES

Author(s):
Publication title:
Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
164
Pub. Year:
1990
Page(from):
347
Page(to):
352
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990524 [1558990526]
Language:
English
Call no.:
M23500/164
Type:
Conference Proceedings

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