POWER DENSITY EFFECTS IN THE PHYSICAL AND CHEMICAL PROPERTIES OF SPUTTERED DIAMOND-LIKE CARBON THIN FILMS
- Author(s):
Cho, N.-H. Krishnan, K.M. Veirs, D.K. Rubin, M.D. Hopper, C.B. Bhushan, B. Bogy, D.B. - Publication title:
- Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 164
- Pub. Year:
- 1990
- Page(from):
- 309
- Page(to):
- 314
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558990524 [1558990526]
- Language:
- English
- Call no.:
- M23500/164
- Type:
- Conference Proceedings
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