Blank Cover Image

*CONTROL OF CHEMICAL REACTIONS FOR GROWTH OF CRYSTALLINE Si AT LOW SUBSTRATE TEMPERATURE

Author(s):
Publication title:
Materials issues in microcrystalline semiconductors : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
164
Pub. Year:
1990
Page(from):
195
Page(to):
204
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990524 [1558990526]
Language:
English
Call no.:
M23500/164
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings GROWTH OF ZnSe AND ZnSSe AT LOW TEMPERATURE WITH AID OF ATOMIC HYDROGEN AND ALTERNATE GAS SUPPLY

Gotoh, Jun, Shirai, hajime, Hanna, Jun-ichi, Shimizu, Isamu

Materials Research Society
7 Conference Proceedings Poly-SiGe TFTs Fabricated by Low Temperature Chemical Vapor Deposition at 450°C

Shimizu, Kousaku, Zhang, Jianjun, Lee, Jeong-woo, Hanna, Jun-ichi

Materials Research Society
2 Conference Proceedings GROWTH OF CRYSTALLINE SILICON, MICROCRYSTALLINE AND EPITAXIAL AT LOW SUBSTRATE TEMPERATURE

Tanabe, H., Azuma, A., Uematsu, T., Shirai, H., Hanna, J., Shimizu, I.

Materials Research Society
8 Conference Proceedings Direct Nucleation and Selective Growth of Nuclei for High Crystallinity Poly-SiGe Thin Films on SiO2 Substrates

Hanna, Jun-Ichi, Shiota, Kunihiro, Yamamoto, Masaji

MRS - Materials Research Society
3 Conference Proceedings Low-Temperature Growth of Poly-Si and SiGe Thin Films by Reactive Thermal CVD and Fabrication of High Mobility TFTs Over 50 cm2/Vs

Hanna, Jun-ichi, Shimizu, Kousaku

Materials Research Society
9 Conference Proceedings A NOVEL PREPARATION TECHNIQUE TERMED “CHEMICAL ANNEALING” TO MAKE A RIGID AND STABLE Si-NETWORK

Shirai, H., Hanna, J.-I., Shimizu, I.

Materials Research Society
4 Conference Proceedings Low Temperature Growth of Polycrystalline Film of Silicon-Rich Silicon-Germanium by Reactive Thermal Chemical Vapor Deposition

Shimizu, Kousaku, Zhang, Jianjun, Lee, Jeong-woo, Hanna, Jun-ichi

Materials Research Society
10 Conference Proceedings Charge Carrier Lifetimes in a Smectic Liquid Crystalline Photoconductor of a 2-phenylnaphthalene Derivative

Iino, Hiroaki, Hanna, Jun-ichi

Materials Research Society
5 Conference Proceedings PREPARATION OF CRYSTALLINE Si THIN FILMS BY SPONTANEOUS CHEMICAL DEPOSITION

Komiya, Tohru, Kamo, Akira, Kujirai, Hiroshi, Shimizu, Isamu, Hanna, Jun-ichi

Materials Research Society
11 Conference Proceedings GROWTH KINETICS FOR PROPAGATION OF Si-NETWORK

Azuma, M., Shirai, H., Hanna, J., Shimizu, I.

Materials Research Society
6 Conference Proceedings EARLY STAGE IN POLYCRYSTALLINE GROWTH OF Si BY FLUORO OXIDATION OF SILANE

Endo, Kenji, Bunyo, Masahiro, Shimizu, Isamu, Hanna, Jun-Ichi

Materials Research Society
12 Conference Proceedings Characteristics of Bottom Gate Thin Film Transistors With Silicon Rich Poly-Si1-xGex and Poly-Si Fabricated by Reactive Thermal Chemical Vapor Deposition

Shimizu, Kousaku, Zhang, Jian Jun, Lee, Jeong-Woo, Hanna, Jun-ichi

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12