EXTREME SUPERSATURATION OF OXYGEN IN LOW TEMPERATURE EPITAXIAL SILICON AND SILICON-GERMANIUM ALLOYS

EXTREME SUPERSATURATION OF OXYGEN IN LOW TEMPERATURE EPITAXIAL SILICON AND SILICON-GERMANIUM ALLOYS

Author(s):

Publication title:

Impurities, defects, and diffusion in semiconductors : bulk and layered structures : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

163

Pub. Year:

1990

Page(from):

591

Page(to):

596

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990517 [1558990518]

Language:

English

Call no.:

M23500/163

Type:

Conference Proceedings

Details

TDL ID:	ZA00015647
Series ID:	PA00000011
Conf. info. (Name):	Symposium on impurities, defects, and diffusion in semiconductors
Conf. info. (Number):	1989
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1989.11.27-1989.12.01

Similar Items:

1 Conference Proceedings TEMPERATURE MEASUREMENT BY INFRARED TRANSMISSION FOR RAPID THERMAL PROCESSING APPLICATIONS Sturm, J.C., Schwartz, P.V., Garone, P.M. Materials Research Society	7 Conference Proceedings OXYGEN CLUSTERING IN CZOCHRALSKI SILICON AT LOW TEMPERATURES: ENHANCED DIFFUSION OR SPATIAL CORRELATION? McQuaid, S.A., Johnson, B.K., Gambaro, D., Falster, R., Ashwin, M., Newman, R.C. Electrochemical Society
2 Conference Proceedings GROWTH AND DOPING KINETICS OF GeXSi1-X STRUCTURES BY LIMITED REACTION PROCESSING Garone, P. M., Sturm,. J. C., Schwartz, P. V., Schwarz, S. A., Wilkens, B. Materials Research Society	8 Conference Proceedings *RAPID THERMAL CHEMICAL VAPOR DEPOSITION OF GERMANIUM AND GERMANIUM/SILICON ALLOYS ON SILICON: NEW APPLICATIONS IN THE FABRICATION OF MOS TRANSISTORS Ozturk, M. C., Grider, D. T., Ashburn, S. P., Sanganeria, M., Wortman, J. J. Materials Research Society
3 Conference Proceedings ELECTRON-BEAM-INDUCED-CURRENT (EBIC) IMAGING OF DEFECTS IN Si1-XGeX MULTILAYER STRUCTURES Sturm, J. C., Xiao, X., Garone, P. M., Schwartz, P. V. Materials Research Society	9 Conference Proceedings THE EFFECT OF HYDROGEN ON THE STRUCTURE AND ELECTRICAL AND OPTICAL PROPERTIES OF SILICON-GERMANIUM ALLOYS Fortmann, C.M., Albright, D.E., Campbell, I.H., Fauchet, P.M. Materials Research Society
4 Conference Proceedings PHOTOLUMINESCENCE IN HYDROGENATED SILICON-GERMANIUM ALLOYS Ranganathan, R., Gal. M., Viner, J. M., Taylor, P. C. Materials Research Society	10 Conference Proceedings Low Resistivity Boron Doped Amorphous Silicon-Germanium Alloy Films Obtained With a Low Frequency Plasma Heredia-J, A., Torres-J, A., De la Hidalga-W, F.J., Jaramillo-N, A., Sanchez-M, J., Zuniga-I, C., Basurto-P, M., Perez, … Materials Research Society
5 Conference Proceedings Transmission of silicon and germanium in the infrared at reduced temperatures Peters,J.E., Ownby,P.D., Poznich,C.R., Richter,J.C. SPIE - The International Society for Optical Engineering	11 Conference Proceedings Low-temperature quartz-to-silicon bonding for SAW applications Berthold,A., Sarro,P.M., Vallekoop,M.J. SPIE-The International Society for Optical Engineering
6 Conference Proceedings FORMATION OF STACKING FAULT TETRAHEDRA DURING EPITAXIAL GROWTH OF SILICON AND GERMANIUM-SILICON LAYERS ON {lll} SILICON SUBSTRATES Brasen, D., Nakahara, S., Bean, J.C. Materials Research Society	12 Conference Proceedings EFFECTS OF IMPLANT TEMPERATURE ON DISORDERING OF A1As-GaAs SUPERLATTICES Dobisz, E.A., Tell, B., Craighead, H.G., Schwarz, S.A., Tamargo, M.C., Harbison, J.P. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12