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SEM OBSERVATION OF GROWTH AND DEFECT FORMATION OF HETEROEPITAXIALLY GROWN SiC ON (100) SILICON

Author(s):
Publication title:
Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
162
Pub. Year:
1990
Page(from):
457
Page(to):
462
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990500 [155899050X]
Language:
English
Call no.:
M23500/162
Type:
Conference Proceedings

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