Blank Cover Image

CHARACTERIZATION OF HEAVY METAL CONTAMINATION IN DIAMOND FILMS USING MIMS, TXRF, AND RBS

Author(s):
Publication title:
Diamond, silicon carbide, and related wide bandgap semiconductors : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
162
Pub. Year:
1990
Page(from):
261
Page(to):
266
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990500 [155899050X]
Language:
English
Call no.:
M23500/162
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings TXRF CHARACTERIZATION OF TRACE METAL CONTAMINATION IN THIN GATE OXIDES .

Hockett, R.S., Hymes, Diane

Materials Research Society
7 Conference Proceedings Comparison of Wafer Cassette Contamination Using Multi-Techniques

Metz, J.M., Radicati, F., Craig, A.Y., Hockett, R.S.

Electrochemical Society
2 Conference Proceedings TXRF REFERENCE STANDARDS: A DISCUSSION

Hockett, R.S.

Electrochemical Society
8 Conference Proceedings ION IMPLANTED CALIBRATION STANDARDS FOR Si SURFACE CONTAMINATION DETECTION BY TXRF

Jacobson, D. C., Poate, J. M., Higashi, G. S., Boone, T., Eaglesham, D. J., Hockett, Richard

MRS - Materials Research Society
3 Conference Proceedings SIMS measurements of metal contamination in SOI

Hong Yang, M., Wang, A., Neuburger, M., Hockett, R.S.

Electrochemical Society
9 Conference Proceedings INVESTIGATIONS OF RESIDUAL CHLORINE ON ETCHED AlCu METAL LINES BY TOTAL REFLECTION X-RAY FLUORESCENCE (TXRF)

Hockett, R. S., Herman, M. H., Mu, X. C., Ma, Li-Jia

Materials Research Society
4 Conference Proceedings SURFACE METAL CONTAMINATION ON SILICON WAFERS MEASURED BY SurfaceSIMS

Smith, Stephen P., Hitzman, C.J., Hockett, R.S.

Electrochemical Society
10 Conference Proceedings THE CORRELATION BETWEEN QUANTITATIVE SURFACE METALLIC CONTAMINATION AND RTP-INDUCED SURFACE DEFECTS

Hockett, R. S.

Materials Research Society
5 Conference Proceedings TOTAL REFLECTION X-RAY FLUORESCENCE (TXRF)

Hockett, R. S.

MRS - Materials Research Society
11 Conference Proceedings ANOMALOUS IRON AND CHROMIUM CONTAMINATION FROM BOE

Hockett, R.S., Metz, J.M., Ritterbush, L., Torry, P., Corrado, J.

Electrochemical Society
6 Conference Proceedings SIMS Study of C, O and N Impurity Contamination for Multi-Crystalline Si Solar Cells

Larry Wang, R.S. Hockett

Materials Research Society
12 Conference Proceedings SIMS MEASURMENT OF OXYGEN IN HEAVILY-DOPED SILICON

Bleiler R.J., Hockett, R.S., Chu, P., Strathman E.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12