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CHARACTERIZATION OF SIDEWALL RESIDUE FILM AND ATOMIC STRUCTURE OF THE TRENCH FORMED BY BCl3/Cl2 REACTIVE ION ETCHING

Author(s):
Publication title:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
158
Pub. Year:
1990
Page(from):
431
Page(to):
438
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990463 [1558990461]
Language:
English
Call no.:
M23500/158
Type:
Conference Proceedings

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