Blank Cover Image

THE ROLE OF ADSORPTION AND VAPOR PRESSURE IN FOCUSED ION BEAM INDUCED DEPOSITION OF CARBON FILMS

Author(s):
Publication title:
In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
158
Pub. Year:
1990
Page(from):
229
Page(to):
234
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990463 [1558990461]
Language:
English
Call no.:
M23500/158
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Use of Focused Ion Beams as a Diagnostic Tool*

Banerjee,I., Kirch,S.J.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF SILICON INSULATING FILMS INDUCED WITH PERPENDICULAR ELECTRON BEAM

Zarnani, H., Rocca, J. J., Bishop, D., Cody, N. W., Collins, G. J.

Materials Research Society
2 Conference Proceedings Use of Focused Ion Beams as a Diagnostic Tool

Banerjee, I., Kirch, S.J.

Electrochemical Society
8 Conference Proceedings MICROSTRUCTURE OF GOLD FILMS GROWN BY ION INDUCED DEPOSITION

Ro, J. S., Dubner, A. D., Thompson, C. V., Melngailis, J.

Materials Research Society
3 Conference Proceedings Focused Ion Beam Induced Deposition

Melngailis J., Dubner D. A., Ro S. J., Shedd M. G., Lezec H.

Martinus Nijihoff Publishers
9 Conference Proceedings Focused Electron Beam Induced Deposition of Silicon Dioxide

H. Wanzenboeck, M. Fischer, J. Gottsbachner, S. Mueller, W. Brezna, M. Schramboeck, E. Bertagnolli

Electrochemical Society
4 Conference Proceedings THE MICROSTRUCTURE OF GOLD FILMS WRITTEN BY FOCUSED ION BEAM INDUCED DEPOSITION

Blauner, P.G., Ro, J.S., Butt, Y., Thompson, C.V., Melngailis, J.

Materials Research Society
10 Conference Proceedings Morphological Studies of Focused Ion Beam Induced Tungsten Deposition

Langfischer, H., Harasek, S., Wanzenboeck, H., Lugstein, A., Basnar, B., Bertagnolli, E.

Electrochemical Society
5 Conference Proceedings Time Resolved Studies of Focused Ion Beam Induced Tungsten Deposition

Langfischer, H., Harasek, S., Wanzenboeck, H. D., Basnar, B., Bertagnolli, E.

Materials Research Society
11 Conference Proceedings CARBON FILM DEPOSITION ON SILICON USING LOW ENERGY ION BEAMS

Fuguang, Qin, Zhenyu, Yao, Zhizhang, Ren, Lee, S. -T., Bello, I., Feng, X., Huang, L. J., Lau, W. M.

Materials Research Society
6 Conference Proceedings *FOCUSED ION BEAM INDUCED DEPOSITION

Melngailis, John, Blauner, Patricia G.

Materials Research Society
12 Conference Proceedings Gallium nitride nanowires: polar surface controlled growth, ohmic contact patterning by focused ion-beam-induced direct Pt deposition and disorder effects, …

Nam, C. -Y., Tham, D., Jaroenapibal, P., Kim, J., Luzzi, D. E., Evoy, S., Fischer, J. E.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12