Blank Cover Image

RBS STUDIES OF DAMAGE BEHAVIOR IN SILICON INDUCED BY P2+ IMPLANTATION

Author(s):
Publication title:
Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
157
Pub. Year:
1990
Page(from):
739
Page(to):
744
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990456 [1558990453]
Language:
English
Call no.:
M23500/157
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A STUDY OF DAMAGE IN SILICON CREATED BY P2+ AND P+ IMPLANTATION

Ziwei, fang, Chenglu, Lin, Shihchang, Tsou

Materials Research Society
7 Conference Proceedings Anomalous damage behavior of BF2+ implantation in silicon

C. Lin, Z.Y. Zhou, X.Q. Li, S. Zou, P.L.F. Hemment

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings THE EFFECT OF Si, F IMPLANTATION ON THE FORMATION AND LIGHT EMITTING PROPERTIES OF POROUS SILICON

Wang, Lianwei, Lin, Chenglu, Liu, Ping, Zhou, Zuyao, Zou, Shichang

MRS - Materials Research Society
8 Conference Proceedings THERMAL ANNEALING OF AMORPHOUS CoMnNiO FILM ON OXIDIZED Si SUBSTRATE

Hui, Tan, Dong, Qin, Mingde, Tao, Chenglu, Lin, Shichang, Zou

Materials Research Society
3 Conference Proceedings RAPID THERMAL ANNEALING OF Si+ AND P+ DUALLY IMPLANTED InP

Honglie, Shen, Genqing, Yang, Zuyao, Zhou, Shichang, Zou

Materials Research Society
9 Conference Proceedings INVESTIGATION OF TITANIUM NITRIDE SYNTHESIZED BY ION BEAM ENHANCED DEPOSITION

Jiankun, Zhou, Xianghuai, Liu, Youshan, Chen,, Zhihong, Zheng, Wei, Huang, Zuyao, Zhou, Shichang, Zou

Materials Research Society
4 Conference Proceedings ELECTRICAL AND OPTICAL PROPERTIES OF Si+ AND P+ IMPLANTED InP:Fe

Shen, Honglie, Yang, Genqing, Zhou, Zuyao, Xia, Guanqun, Zou, Shichang

Materials Research Society
10 Conference Proceedings A COMPARISON OF ELLIPSOMETER AND RBS ANALYSIS OF IMPLANT DAMAGE IN SILICON

Paulson, W. M., Wilson, S. R., White, C. W., Appleton, B. R.

North-Holland
5 Conference Proceedings CHARACTERIZATION OF EPITAXIAL CoSi2 FILM GROWTH ON Si(100) BY SLOW POSITRON BEAM

Liu, Ping, Lin, Chenglu, Zhou, Zuyao, Weng, Huiming, Li, Bingzong, Han, Rongdian, Zou, Shichang

MRS - Materials Research Society
11 Conference Proceedings SIMS , SAM AND RBS STUDY OF HIGH-DOSE OXYGEN IMPLANTATION INTO SILICON

Lau, W. M., Ratnam, P., Salama, C. A. T.

Materials Research Society
6 Conference Proceedings INVESTIGATION ON MECHANISMS FOR ION BEAM INDUCED DEGRADATION OF POLYIMIDE

Xu, X.L., Zuyao, Zhou, Lizhi, Chen, Shichang, Zou

Materials Research Society
12 Conference Proceedings RBS-Channeling and EPR Studies of Damage in 2 MeV Al2+_Implanted 6H-SiC Substrates

Morilla, Y., Garcia Lopez, J., Battistig, G., Cantin, J. L., Cheang-Wong, J. C., Bardeleben, H. J. von, Respaldiza, M. …

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12