Blank Cover Image

AVOIDING TRANSIENT DIFFUSION OF BORON IN Si (100)

Author(s):
Schreutelkamp, R.J.
Lu, W.X.
Saris, F.W.
Janssen, K.T.F.
Ottenheim, J.J.M.
Kaim, R.E.
Westendorp, J.F.M.
2 more
Publication title:
Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
157
Pub. Year:
1990
Page(from):
691
Page(to):
696
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990456 [1558990453]
Language:
English
Call no.:
M23500/157
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings INFLUENCE OF PHOSPHORUS DOPANT CONCENTRATION ON RECRYSTALLIZATION OF BURIED AMORPHOUS LAYERS IN SI (100) PRODUCED BY CHANNELED IMPLANTS

Schreutelkamp, R.J., Janssen, K.T.F., Saris, F.W., Westendorp, J.F.M., Kaim, R.E.

Materials Research Society
7 Conference Proceedings Influence of Flouring and BF2 Implants on the Transient Enhanced Diffusion of Boron

Vuong, H-H., Gossmann, H.-J., Rafferty, C.S., Luftman, H.S., Unterwald, F.C., Jacobson, D.C., Ahrens, R.E, Boone, T., …

Electrochemical Society
2 Conference Proceedings GETTERING OF CU AT BURIED DAMAGE LAYERS MADE BY Si SELF IMPLANTATION

Liefting, J.R., Schreutelkamp, R.J., Lu, W.X., Saris, F.W.

Materials Research Society
8 Conference Proceedings Transient-Enhanced Diffusion of Boron in Silicon: The Interstitial Flux

Simpson, T. W., Goldberg, R. D., Mitchell, I. V., Baribeau, J-M.

MRS - Materials Research Society
3 Conference Proceedings *METASTABLE ALLOY FORMATION BY ION BEAM MIXING

Saris, F.W., Westendorp, J.F.M., Vredenberg A.

Materials Research Society
9 Conference Proceedings Transient Enhanced Diffusion of Boron in Silicon: The Interstitial Flux

Simpson, T. W., Goldberg, R. D., Mitchell, I. V., Baribeau, J-M.

MRS - Materials Research Society
4 Conference Proceedings An ion-scattering study of oxygen indiffusion during pulsed laser annealing/cleaning of silicon

Westendorp, J.F.M., Wang, Z.L., Saris, F.W.

North Holland
10 Conference Proceedings A channeling study of defect-boron complexes in Si

Swanson, M.L., Howe, L.M., Saris, F.W., Quenneville, A.F.

North Holland
5 Conference Proceedings ANOMALOUS TRANSIENT TAIL DIFFUSION OF BORON IN SILICON: KINETIC MODELING OF DIFFUSION AND CLUSTER FORMATION

Cowern, N.E.B., Jos, H.F.F., Janssen, K.T.F, Wachters, A.J.H.

Materials Research Society
11 Conference Proceedings A COMPARISON OF ATOMIC MIXING BEHAVIOR OF Cu-Au AND Cu-W SYSTEMS FOR ROOM TEMPERATURE AND LOW TEMPERATURE IRRADIATION

Wang, Z. L., Westendorp, J. F. M., Doorn, S., Saris, F. W.

North-Holland
6 Conference Proceedings AVOIDING DISLOCATION FORMATION FOR B, P, AND As IMPLANTS IN SILICON

Liefting, J. R., Raineri, V., Schreutelkamp, R. J., Custer, J., Saris, F. W.

Materials Research Society
12 Conference Proceedings Dislocation Formation in Si Implanted at Elevated Temperature

Liefting R. J., Custer S. J., Schreutelkamp J. R., Saris W. F.

Kluwer Academic Publishers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12