Blank Cover Image

BROAD AND FOCUSED ION BEAM Ga+ IMPLANTATION DAMAGE IN THE FABRICATION OF p+-nSi SHALLOW JUNCTIONS

Author(s):
Publication title:
Ion beam processing of advanced electronic materials : symposium held April 25-27, 1989, San Diego, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
147
Pub. Year:
1989
Page(from):
161
Page(to):
168
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990203 [1558990208]
Language:
English
Call no.:
M23500/147
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ION BEAM MIXING OF GaAs/A1GaAs SUPERLATTICES AND ITS RELATIONSHIP TO AMORPHIZATION

Pronko,. P. P., McCormick, A. W., Patrizio, D. B., Rai, A. K., Kolbas, R. M., Frank, B. S.

Materials Research Society
7 Conference Proceedings ION IRRADIATION SMOOTHING AND FILM BONOIMG FOR LASER MIRRORS

Pronko, P. P., McCormick, A. W., Ingram, D. C., Rai, A. K., Woollam, J. A., Appleton, B. R., Poker, D. B.

North-Holland
2 Conference Proceedings RAPID THERMAL ANNEALING OF FIB-IMPLANTED Ga SHALLOW IMPURITY PROFILES

Lin, C-M., Steckl, A. J., Chow, T. P.

Materials Research Society
8 Conference Proceedings Ultra-Shallow P+/N Junction Formed By Plasma Ion Implantation

Baek, S.K., Choi, C.J., Seong, T.-Y., Hwang, Hyunsang, Kim, H. K., Moon, D. W.

Materials Research Society
3 Conference Proceedings SYNTHESIS OF MoS2 PHASE IN THE NEAR SURFACE REGION OF Al2O3 AND ZrO2 BY ION IMPLANTATION

Rai, A.K., Bhattacharya, R.S., Kung, S.C., Patrizio, D.

Materials Research Society
9 Conference Proceedings Focused Ion Beam Technology and Applications

Steckl J. A., Corelli C. J., McDonald F. J.

Martinus Nijihoff Publishers
4 Conference Proceedings SUB-MICRON SELECTIVE PHOTOLUMINESCENCE IN POROUS Si BY FOCUSED ION BEAM IMPLANTATION

Steckl, A.J., Xu, J., Mogul, H.C., Mogren, S.

Materials Research Society
10 Conference Proceedings Exploring Alternative Annealing Methods for Shallow Junction Formation in Ion Implanted Silicon

Jones, K.S., Banisaukis, H., Earles, S., Lindfors, C., Griglione, M., Law, M.E., Taiwar, S., Falk, S.W., Downey, D.F., …

Electrochemical Society
5 Conference Proceedings MODIFICATION OF STANLESS STEEL SURFACES BY ION BEAMS FOR IMPROVED CORROSION RESISTANCE

Bhattacharya, R. S., Raffoui, C. N., Rai, A. K., Pronko, P. P.

Materials Research Society
11 Conference Proceedings REACTVE ION ETCHING DAMAGE TO SHALLOW JUNCTIONS

Wu, I.W., Bruce, R.H., Mikkelsen, J.Jr.C., street, R.A., Huang, T.Y., Braun, D.

Materials Research Society
6 Conference Proceedings DEPTH PROFILING OF HYDROGEN IN ION-IMPLANTED POLYMERS

Carlson, J. D., Pronko, P. P., Ingram, D. C.

North-Holland
12 Conference Proceedings SHALLOW P+-N JUNCTION FABRICATION BY PLASMA IMMERSION ION IMPLANTATION

Pio, C. A., Qian, X. Y., Jones, E., Lieberman, M. A., Cheung, N. W.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12