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CHANNELING OF SHALLOW Si IMPLANTS INTO GaAs AS A FUNCTION OF TILT AND ROTATION ANGLES

Author(s):
Hovel, Harold J.
McKoy, T. E.
Mitchell, J. M.
Scilla, G.
Moore, S. J.
Cardone, F.
1 more
Publication title:
Advances in materials, processing, and devices in III-V compound semiconductors
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
144
Pub. Year:
1989
Page(from):
439
Page(to):
444
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990173 [1558990178]
Language:
English
Call no.:
M23500/144
Type:
Conference Proceedings

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