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CHEMICAL VAPOR DEPOSITION OF SILICON CARBIDE USING A NOVEL ORGAMOMETALLIC PRECURSOR

Author(s):
Lee, Wie
Interrante, Leonard V.
Czekaj, Corrina
Hudson, John
Lenz, Klaus
Sun, Bing-Xi
1 more
Publication title:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
131
Pub. Year:
1989
Page(from):
431
Page(to):
438
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990043 [1558990046]
Language:
English
Call no.:
M23500/131
Type:
Conference Proceedings

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