*SELECTIVE-AREA LASER-ASSISTED PROCESSING FOR MICRO-ELECTRONIC MULTI-CHIP INTERCONNECT APPLICATIONS

*SELECTIVE-AREA LASER-ASSISTED PROCESSING FOR MICRO-ELECTRONIC MULTI-CHIP INTERCONNECT APPLICATIONS

Author(s):: Miracky, R.F.
Publication title:: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 129
Pub. Year:: 1989
Page(from):: 547
Page(to):: 558
Pages:: 12
Pub. info.:: Pittsburgh, Pa.: Materials Research Society
ISSN:: 02729172
ISBN:: 9781558990029 [155899002X]
Language:: English
Call no.:: M23500/129
Type:: Conference Proceedings

Details

TDL ID:	ZA00015614
Series ID:	PA00000011
Conf. info. (Name):	Symposium on laser and particle-beam chemical processes on surfaces
Conf. info. (Number):	1988
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1988.11.29-1988.12.02

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