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CHARACTERISTICS OF Si-IMPLANTED (211) VERSUS (100) GaAS

Author(s):
Epp, J.
Dillard, J.G.
Siochi, A.
Zallen, R.
Cole, E.D.
Sen, S.
Vaseashta, A.
Burton, L.C.
3 more
Publication title:
Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
128
Pub. Year:
1989
Page(from):
677
Page(to):
682
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990012 [1558990011]
Language:
English
Call no.:
M23500/128
Type:
Conference Proceedings

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