Blank Cover Image

INFLUENCE OF THE IMPLANTED SPECIES ON THE RESIDUAL DAMAGE AFTER HOT IMPLANTS IN SILICON

Author(s):
Calcagno, L.
Spinella, C.
Catania, M.
Campisano, S.U.
Foti, G.
Ferla, G.
Rimini, E.
2 more
Publication title:
Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
128
Pub. Year:
1989
Page(from):
581
Page(to):
586
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990012 [1558990011]
Language:
English
Call no.:
M23500/128
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings SELF AND ION BEAM ANNEALING OF P, Ar, AND Kr IN SILICON

Cannavo, S., La Ferla, A., Campisano, S.U., Rimini, E., Ferla, G., Gandolfi, L., Liu, J., Servidori, M.

Materials Research Society
7 Conference Proceedings *DAMAGE ACCUMULATION AND ANNEALING IN ION IRRADIATED SILICON

Priolo, F., Battaglia, A., Spinella, C., Rimini E.

Materials Research Society
2 Conference Proceedings Light absorption effects on the Nd laser annealing of ion implanted silicon

Baeri, P., Barbarino, A.E., Campisano, S.U., Grimaldi, M.G., Foti, G., Rimini, E.

North Holland
8 Conference Proceedings ION-ASSISTED REGROWTH OF DEPOSITED Si LAYERS MECHANISMS AND MORPHOLOGY

Priolo, F., Spinella, C., La Ferla, A., Battaglia, A., Rimini, E., Ferla, G., Carnera, A., Gasparotto, A.

Materials Research Society
3 Conference Proceedings TEMPERATURE DEPENDENCE OF ION ASSISTED EPITAXIAL GROWTH OF CHEMICAL VAPOR DEPOSITED Si LAYERS

La Ferla, A., Rimini, E., Spinella, C., Ferla, G.

Materials Research Society
9 Conference Proceedings Ion-Assisted Nucleation in Amorphous Silicon

Battaglia A., Spinella C., Priolo F., Campisano U. S.

Kluwer Academic Publishers
4 Conference Proceedings IMPURITY REDISTRIBUTION IN ION IMPLANTED SI AFTER PICOSECOND Nd LASER PULSE IRRADIATION

Campisano, S. U., Baeri, P, Rimini, E., Russo, G., Malvezzi, A. M

North-Holland
10 Conference Proceedings THIN POLYMERIC FILMS PRODUCED BY ION IMPLANTATION FROM FROZEN ORGANIC MOLECULES

Calcagno, L., Sheng, K. L., Foti, G.

North-Holland
5 Conference Proceedings AMORPHOUS TO POLYCRYSTAL TRANSITION ASSISTED BY ION BEAM IRRADIATION IN SILICON

Spinella, C., Lombardo, S., Campisano, S.U.

Materials Research Society
11 Conference Proceedings Miniaturized proton exchange fuel cell in micromachined silicon surface

D'Arrigo, G., Spinella, C., Rimini, E., Rubino, L., Lorenti, S.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Velocity and orientation dependence of solute trapping in Si

Baeri, P., Foti, G., Poate, J.M., Campisano, S.U., Rimini, E., Cullis, A.G.

North Holland
12 Conference Proceedings Ion Beam Processing of Chemical Vapor Deposited Silicon Layers

Campisano S. U., Spinella C., Priolo F.

Kluwer Academic Publishers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12