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*DRY ETCHING AND IMPURITY DIFFUSIN FOR INTEGRATED OPTOELECTRONICS

Author(s):
Coldren, L.A.  
Publication title:
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
126
Pub. Year:
1988
Page(from):
237
Page(to):
244
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837968 [0931837960]
Language:
English
Call no.:
M23500/126
Type:
Conference Proceedings

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