Blank Cover Image

INVESTIGATION OF PROCESSING PARAMETERS ON STABILITY OF (SOG) FILMS ON PATTERNED Si WAFERS

Author(s):
Publication title:
Better ceramics through chemistry III : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
121
Pub. Year:
1988
Page(from):
767
Page(to):
772
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837913 [093183791X]
Language:
English
Call no.:
M23500/121
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings METAL OXIDE FILMS FROM CARBOXYLATE PRECURSORS

Davison, W.W., Shyu, S.G., Roseman, R.D., Buchanan, R.C.

Materials Research Society
7 Conference Proceedings Performance of a high-NA dual-stage 193-nm TWINSCAN Step and Scan system for 80-nm applications

Klerk, J., Jorritsma, L., Setten, E., Droste, R., Jongh, R.C., Hansen, S.G., Smith, D., Kerkhof, M.A., Mast, F., …

SPIE-The International Society for Optical Engineering
2 Conference Proceedings HIGH TC SUPERCONDUCTING FILMS FROM METALLO-ORGANIC PRECURSORS

Davidson, W. W., Shyu, S. G., Buchanan, R. C.

Materials Research Society
8 Conference Proceedings PREPARATION OF HIGH TC YBa2Cu3O7-x POWDERS FROM NITRATE AND OXALATE PRECURSORS

Kayser, M. H., Borglum, B., Antony, G., Shyu, S. G., Buchanan, R. C.

Materials Research Society
3 Conference Proceedings Calibration of ESCAP resist simulation parameters from consideration of printed CD pitch bias, CD measurement offset, and wafer thermal history

Robertson, S.A., Kang, D., Tye, S.D., Hansen, S.G., Fumar-Pici, A., Chiou, T.-B., Byers, J.D., Mack, C.A., Smith, M.D.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings EPR Study of As-Deposited and Low-Temperature Crystallised LPCVD and APCVD Amorphous Silicon Films

Panwar,O.S., Ennis,T.J., Barklie,R.C., Moore,R.A.

SPIE-The International Society for Optical Engineering, Narosa
4 Conference Proceedings Integration of SOG/CMP Processes

Choi, D., Sung, B., Hosseini, R., Lee, J., Sutshi, A., Bibby, T., Tredinnick, B.

Electrochemical Society
10 Conference Proceedings GLASS FILMS AND INTERFACES IN MICROELECTRONIC APPLICATIONS

Buchanan, R.C., Beck, C.V.

Materials Research Society
5 Conference Proceedings SOG etch-back process induced surface roughness

Chu,P.-T., Chen,S.-F., Wu,J.-S., Hung,C.-C., Lin,T.-H., Chao,Y.-C.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Synthesis of oxide films from metallo-organic liquid precursors

R.C. Buchanan, P.-Y. Chu

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings PROPERTIES OF E-BEAM INTERACTIVE OXIDE FILMS

Hollenbeck, J.L., Buchanan, R.C.

Materials Research Society
12 Conference Proceedings Parameter estimation techniques for a polarization hysteresis model

Smith, R.C., Hatch, A.G.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12