Blank Cover Image

AMORPHOUS HYDROGENATED SILICON THIN FILM TRANSISTORS MANUFACTURED BY A PHOTO-CVD TECHNIQUE

Author(s):
Publication title:
Amorphous silicon technology : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
118
Pub. Year:
1988
Page(from):
261
Page(to):
266
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837883 [093183788X]
Language:
English
Call no.:
M23500/118
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings HYDROGENATED AMORPHOUS SILICON THIN-FILM DEPOSITION BY DIRECT PHOTO-ENHANCED DECOMPOSITION OF SILANE USING AN INTERNAL HYDROGEN DISCHARGE LAMP

Roberston, P.A., Milne, W.I.

Materials Research Society
7 Conference Proceedings A NEW MODEL FOR THE POLY-SILICON THIN FILM TRANSISTOR FOR USE WITH SPICE

Izzard, M.J., Migliorato, P., Milne, W.I.

Materials Research Society
2 Conference Proceedings PHOTOENHANCED DEPOSITION OF SILICON OXIDE THIN FILMS USING AN INTERNAL NITROGEN DISCHARGE LAMP

Robertson, P.A., Milne, W.I.

Materials Research Society
8 Conference Proceedings Low Temperature Growth of High Quality SiO2 at Less Than 100℃ By ECR-PECVD For Thin Film Transistors

Rashid, Riyaz, Flewitt, A.J., Robertson, John, Milne, W.I.

Electrochemical Society
3 Conference Proceedings Hydrogenated Amorphous Silicon And Silicon Nitride Deposited At Less Than 100°C By ECR-PECVD For Thin Film Transistors

Dyson, A. P., Flewitt, A. J., Milne, W. I., Robertson, J.

Materials Research Society
9 Conference Proceedings Tetrahedral Amorphous Carbon Thin Film Transistors

Clough, F. J., Kleinsorge, B., Milne, W. I., Robertson, J.

MRS - Materials Research Society
4 Conference Proceedings REDUCTION OF THRESHOLD VOLTAGE SHIFT BY BIAS ANNEALING OF HYDROGENATED AMORPHOUS SILICON THIN FILM TRANSISTORS

Deane, S.C., Milne, W.I., Powell, M.J.

Materials Research Society
10 Conference Proceedings COMPARISON OF LOW TEMPERATURE METHODS FOR THE PRODUCTION OF SILICON DIOXIDE THIN FILMS

Baker, Stephen D., Milne, W. I., Taylor, S.

Materials Research Society
5 Conference Proceedings Tetrahedrally Bonded Amorphous Carbon for Use in Thin Film Transistors*

Milne, W.I., Clough, F.J., Kleinsorge, B., Maeng, S.L., Uchikoga, S., Robertson, J.

Electrochemical Society
11 Conference Proceedings COMPARISON OF LOW TEMPERATURE METHODS FOR THE PRODUCTION OF SILICON DIOXIDE THIN FILMS

Baker, Stephen D., Milne, W. I., Taylor, S.

Materials Research Society
6 Conference Proceedings ECR-PECVD of Silicon Nitride and Hydrogenated Amorphous Silicon at 80℃ For TFTs

Flewitt, A.J., Dyson, A.P., Robertson, J., Milne, W.I.

Electrochemical Society
12 Conference Proceedings The Use Of C-V Techniques To Investigate Instability Mechanisms In M-I-S Structures

Paul, S., Milne, W.I, Robertson, J.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12