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ROLE OF POWER DENSITY, U.V. LIGHT AND HYDROGEN DILUTION ON TRANSITION OF AMORPHOUS TO MICROCRYSTALLINE STRUCTURE ON FILMS PRODUCED BY A TCDDC SYSTEM

Author(s):
Vieira, M.
Martins, R.
Macarico, A.
Baia, I.
Soares, F.
Guimaraes, L.
1 more
Publication title:
Amorphous silicon technology : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
118
Pub. Year:
1988
Page(from):
113
Page(to):
116
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837883 [093183788X]
Language:
English
Call no.:
M23500/118
Type:
Conference Proceedings

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