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TEM AND SEM STUDIES OF MULTIPLE SILICON ON INSULATOR FILMS FOR THREE DIMENSIONAL CIRCUITS

Author(s):
Williams, D. A.
McMahon, R. A.
Ahmed, H.
Barfoot, K. M.
Godfrey, D. J.
Dunne, B.
Mathewson, A.
2 more
Publication title:
Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
107
Pub. Year:
1988
Page(from):
235
Page(to):
240
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837753 [0931837758]
Language:
English
Call no.:
M23500/107
Type:
Conference Proceedings

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