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DOPANT DIFFUSION AND GRAIN GROWTH IN ARSENIC-IMPLANTED POLY-Si

Author(s):
Publication title:
Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
106
Pub. Year:
1988
Page(from):
135
Page(to):
142
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837746 [093183774X]
Language:
English
Call no.:
M23500/106
Type:
Conference Proceedings

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