Blank Cover Image

KINETICS OF SILICON OXIDE THIN FILM DEPOSITION FROM SILANE AND DISILANE WITH NITROUS OXIDE

Author(s):
Publication title:
SiO[2] and its interfaces : symposium held November 30-December 5, 1987, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
105
Pub. Year:
1988
Page(from):
127
Page(to):
132
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837739 [0931837731]
Language:
English
Call no.:
M23500/105
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings KINETICS OF SILICON OXIDE THIN FILM DEPOSITION FROM SILANE AND DISILANE WITH NITROUS OXIDE

Chapple-Sokol, Jonathan D., Giunta, Carmen J., Gordon, Roy G.

Materials Research Society
7 Conference Proceedings Chemical Vapor Deposition and Properties of Amorphous Aluminum Oxide Films

Gordon, Roy G., Kramer, Keith, Liu, Xinye

MRS - Materials Research Society
2 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF HIGHLY TRANSPARENT AND CONDUCTIVE BORON DOPED ZINC OXIDE THIN FILMS

Hu, Jinhua, Gordon, Roy G.

Materials Research Society
8 Conference Proceedings X-RAY PHOTOELECTRON SPECTROSCOPY ANALYSIS OF SILICON OXIDE DEPOSITED BY A NITROUS OXIDE/SILANE GLOW DISCHARGE

Thomas III, J. H., Kaganowicz, G.

Materials Research Society
3 Conference Proceedings RF POWER DEPENDENCE OF THE MATERIAL PROPERTIES OF PECVD SILICON DIOXIDE

Chapple-Sokol, J.D., Tierney, E., Batey, J.

Materials Research Society
9 Conference Proceedings Resistivity Reduction of Thin Polycrystalline Silicon Films Crystallized from In Situ Phosphorus-Doped Amorphous Silicon Deposited Using Silane or Disilane

Oguro, S., Shishiguchi, S., Arai, K.

Electrochemical Society
4 Conference Proceedings DEPOSITION OF HIGHLY TRANSPARENT AND CONDUCTIVE FLUORINE DOPED ZINC OXIDE FILMS

Hu, Jianhua, Gordon, Roy G.

Materials Research Society
10 Conference Proceedings ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION OF GALLIUM NITRIDE THIN FILMS

Gordon, Roy G., Hoffman, David M., Riaz, Umar

Materials Research Society
5 Conference Proceedings ELECTRICAL AND OPTICAL PROPERTIES OF INDIUM DOPED ZINC OXIDE FILMS PREPARED BY ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION

Hu, Jianhua, Gordon, Roy G.

Materials Research Society
11 Conference Proceedings EFFECTS OF SUBSTRATE TEMPERATURE AND GAS PHASE CHEMISTRY ON THE APCVD OF a-Si:H FILMS FROM DISILANE

McCurdy, R.J., Gordon, R.G.

Materials Research Society
6 Conference Proceedings PLASMA DEPOSITION OF WIDE GAP, HIGHLY PHOTOCONDUCTIVE a-Si:H THIN FILMS FROM DISILANE-HELIUM MIXTURES

Rajeswaran, G., Vanier, P. E., Corderman, R. R., Kampas, F. J.

Materials Research Society
12 Conference Proceedings Growth Kinetics During Pulsed Laser Deposition of Complex Oxide Thin Films

G. Rijnders, G. Koster, D.H.A. Blank

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12