Blank Cover Image

DEPOSITION OF a-SiNx FILMS BY ArF LASER INDUCED CVD AS DIAGNOSED BY OPTICAL EMISSION SPECTROSCOPY

Author(s):
Publication title:
Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
95
Pub. Year:
1987
Page(from):
267
Page(to):
272
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837623 [0931837626]
Language:
English
Call no.:
M23500/95
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ArF LASER-INDUCED CHEMICAL-VAPOR DEPOSITION OF TUNGSTEN FOR GATE ELECTRODES

Matsuhashi, H., Nishikawa, S., Ohno, S.

Materials Research Society
7 Conference Proceedings Fabrication of Nd,Cr co-doped GGG thin films for a Q-switched waveguide laser by the two-target pulsed KrF Laser deposition method

Fukaya,S., Hasegawa,T., Ishida,Y., Obara,M.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings In Situ Cleaning Process of Silicon Carbide Epitaxial Reactor for Removing Film-Type Deposition Formed on Susceptor

K. Mizuno, H. Habuka, Y. Ishida, T. Ohno

Trans Tech Publications
8 Conference Proceedings Cleaning Process for Using Chlorine Trifluoride Gas Silicon Carbide Chemical Vapor Deposition Reactor

H. Habuka, Y. Fukumoto, K. Mizuno, Y. Ishida, T. Ohno

Trans Tech Publications
3 Conference Proceedings Competitive Growth between Deposition and Etching in 4H-SiC CVD Epitaxy Using Quasi-Hot Wall Reactor

Kushibe, M., Ishida, Y., Okumura, H., Takahashi, T., Masahara, K., Ohno, T., Suzuki, T., Tanaka, T., Yoshida, S., Arai, …

Trans Tech Publications
9 Conference Proceedings SYNTHESIS OF DIAMOND BY LASER-INDUCED CVD

Kitahama, K., Hirata, K., Nakamatsu, H., Kawai, S., Fujimori, N., Imai, T.

Materials Research Society
4 Conference Proceedings Spatially resolved soft x-ray spectroscopy of femtosecond-laser-induced plasmas

Okano, Y., Oguri, K., Nishikawa, T., Nakano, H.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings FORMATION OF SILICON NITRIDE FILMS NEWLY DEVELOPED BY THE ION AND VAPOUR DEPOSITION METHOD

Sugawara, F., Ajioka, T., Ichikawa, F., Ushio, S.

Materials Research Society
5 Conference Proceedings DEPOSITION OF AMORPHOUS CARBON FILMS BY LASER INDUCED CVD

tachibana, H., Nakaue, A., Kawate, Y.

Materials Research Society
11 Conference Proceedings ArF EXCIMER LASER-INDUCED EPITAXIAL GROWTH OF GaAs FILMS ON Si

Chu, Shirley S., Chu, T.L., Chang, C.L.

Materials Research Society
6 Conference Proceedings LOW TEMPERATURE TUNGSTEN DEPOSITION BY ArF-LASER INDUCED PHOTO-CVD

Krans, Rutger L., Berntsen, Arjan, Sinke, Wim C.

Materials Research Society
12 Conference Proceedings Fabrication of the 70-nm line patterns with ArF chromeless phase-shift masks

Iwasaki, H., Ishida, S., Hashimoto, T.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12