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COMPOSITION OXIDATION AND CHEMICAL ETCHING PROPERTIES OF A NEW AMORPHOUS SILICON-BORON THIN FILM

Author(s):
Tong, B. Y.
Wong, S. K.
Yao, J.
Lau, W. M.
Du, N.
John, P. K.
1 more
Publication title:
Amorphous silicon semiconductors -- Pure and hydrogenated : symposium held April 21-24, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
95
Pub. Year:
1987
Page(from):
191
Page(to):
196
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837623 [0931837626]
Language:
English
Call no.:
M23500/95
Type:
Conference Proceedings

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