REAL TIME OBSERVATION OF PERIODIC STEP ARRAYS DURING SILICON VAPOUR PHASE HOMOEPITAXY

REAL TIME OBSERVATION OF PERIODIC STEP ARRAYS DURING SILICON VAPOUR PHASE HOMOEPITAXY

Author(s):

Robbins, D. J.

Publication title:

Initial stages of epitaxial growth : symposium held April 22-24, 1987, Anaheim, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

94

Pub. Year:

1987

Page(from):

167

Page(to):

172

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837616 [0931837618]

Language:

English

Call no.:

M23500/94

Type:

Conference Proceedings

Details

TDL ID:	ZA00015580
Series ID:	PA00000011
Conf. info. (Name):	Symposium on initial stages of epitaxial growth
Conf. info. (Number):	1987
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1987.04.22-1987.04.24

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