*VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE FOR THE STUDY OF ION-BEAM -AND GROWTH MODIFIED SOLIDS

*VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE FOR THE STUDY OF ION-BEAM -AND GROWTH MODIFIED SOLIDS

Author(s):

Publication title:

Materials modification and growth using Ion beams : symposium held April 21-23, 1987, Anaheim, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

93

Pub. Year:

1987

Page(from):

203

Page(to):

214

Pages:

12

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837609 [093183760X]

Language:

English

Call no.:

M23500/93

Type:

Conference Proceedings

Details

TDL ID:	ZA00015579
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials modification and growth using ion beams
Conf. info. (Number):	1987
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1987.04.21-1987.04.23

Similar Items:

1 Conference Proceedings CHARACTERIZATION OF AN ASYMMETRIC TRIANGULAR MULTIPLE QUANTUM WELL, BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY Herzinger, Craig M., Snyder, Paul G., Woollam, John A., Evans, Keith, Stutz, C.E., Jones, R., Merkel, K.G., Reynolds, … Materials Research Society	7 Conference Proceedings VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRIC CHARACTERIZATION OF POLYCRYSTALLINE SILICON THIN FILM MULTILAYER STRUCTURES Snyder, Paul G., Xiong, Yi-Ming, Woollam, John A., Krosche, Eric R. Materials Research Society
2 Conference Proceedings CHARACTERIZATION OF POLYSILICON THIN FILMS BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY Ziong, Yi-Ming, Snyder, Paul G., Woollam, John A., Krosche, Eric R., Strausser, Yale Materials Research Society	8 Conference Proceedings STUDY OF ION IMPLANTED COPPER LASER MIRRORS BY SPECTROSCOPIC ELLIPSOMETRY Snyder, P.G., Massengale, A., Memarzadeh, K., Woollam, J.A., Ingram, D.C., Pronko, P.P. Materials Research Society
3 Conference Proceedings GaAs(100) SURFACE MODIFICATIONS AT ELEVATED TEMPERATURES, STUDIED BY IN-SITU SPECTROSCOPIC ELLIPSOMETRY Yao, Huade, Snyder, Paul G., Woollam, John A. Materials Research Society	9 Conference Proceedings IN SITU AND EX SITU APPLICATIONS OF SPECTROSCOPIC ELLIPSOMETRY Woollam, John A., Johs, Blaine, McGahan, William A., Snyder, Paul G., Hale, Jeffrey, Yao, Huade Walter MRS - Materials Research Society
4 Conference Proceedings IN SITU STUDIES OF ELECTRON CYCLOTRON RESONANCE PLASMA ETCHING OF SEMICONDUCTORS BY SPECTROSCOPIC ELLIPSOMETRY Nafis, S., Ianno, N.J., Snyder, Paul G., Woollam, John A., Johs, Blaine Materials Research Society	10 Conference Proceedings VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRIC STUDY OF SEMICONDUCTOR MULTILAYER STRUCTURES Snyder, P.G., Woollam, J.A., Alterovitz, S.A. Materials Research Society
5 Conference Proceedings IN SITU SPECTROSCOPIC ELLIPSOMETRY FOR REAL TIME SEMICONDUCTOR GROWTH MONITOR Johs Blaine, Meyer, Duane, Cooney, Gerald, Yao, Huade, Snyder, Paul G., Woollam, John A., Edwards, John, Maracas, George Materials Research Society	11 Technical Paper Study of InGaAs Based MODEFET Structures Using Variable Angle Spectroscopic Ellipsometry Alterovitz, S.A., Sieg, R.M., Yao, H.D., Snyder, P.G., Woollam, J.A., Pamulapati, J., Bhattacharya, P.K., Sekula-Moise, … National Aeronautics and Space Adminstration
6 Conference Proceedings SUPERLATTICE OPTICAL PROPERTIES MEASURED BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY Snyder, P. G., Merkel, K. G., De, B. N., Woollam, J. A., Langer, D. W., Stutz, C. E., Jones, R., Rai, A. K., Evans, K. Materials Research Society	12 Conference Proceedings Variable angle spectroscopic ellipsomefry in the vacuum ultraviolet Woollam,J.A., Hilfiker,J.N., Tiwald,T.E., Bungay,C.L., Synowicki,R.A., Meyer,D.E., Herzinger,C.M., Pfeiffer,G.L., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12