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DIFFUSION OF Zn INTO GaAs0.6P0.4:Te FROM Zn-DOPED OXIDE FILMS BY RAPID THERMAL PROCESSING

Author(s):
Usami, A.
Tokuda, Y.
Shiraki, H.
Ueda, H.
Wada, T.
Kan, H.
Murakami, T.
2 more
Publication title:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
92
Pub. Year:
1987
Page(from):
393
Page(to):
400
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837593 [0931837596]
Language:
English
Call no.:
M23500/92
Type:
Conference Proceedings

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