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FORMATION OF Si-ON-INSULATOR STRUCTURE BY LATERAL SOLID PHASE EPITAXY

Author(s):
Miyao, M.
Moniwa, M.
Kusukawa, K.
Warabisako, T.
Murakami, E.
Sinke, W.
1 more
Publication title:
Heteroepitaxy on silicon II : symposium held April 21-23, 1987, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
91
Pub. Year:
1987
Page(from):
387
Page(to):
392
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837586 [0931837588]
Language:
English
Call no.:
M23500/91
Type:
Conference Proceedings

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