COMPARATIVE THICKNESS MEASUREMENTS OF HETEROJUNCTION LAYERS BY ELLIPSOMETRIC, RBS, AND XTEM ANALYSIS

COMPARATIVE THICKNESS MEASUREMENTS OF HETEROJUNCTION LAYERS BY ELLIPSOMETRIC, RBS, AND XTEM ANALYSIS

Author(s):

Woollam, J.A.

Publication title:

Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

77

Pub. Year:

1987

Page(from):

755

Page(to):

760

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837562 [0931837561]

Language:

English

Call no.:

M23500/77

Type:

Conference Proceedings

Details

TDL ID:	ZA00015562
Series ID:	PA00000011
Conf. info. (Name):	Symposium on interfaces, superlattices, and thin films
Conf. info. (Number):	1986
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1986.12.01-1986.12.06

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