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CHEMICAL VAPOR DEPOSITION OF SILICON FILMS USING HEXACHLORODISILANE

Author(s):
Publication title:
Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
77
Pub. Year:
1987
Page(from):
709
Page(to):
714
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837562 [0931837561]
Language:
English
Call no.:
M23500/77
Type:
Conference Proceedings

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