a-Si:H FILMS PREPARED BY ECR PLASMA ENHANCED CVD
- Author(s):
- Publication title:
- Interfaces, superlattices, and thin films : symposium held December 1-6, 1986, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 77
- Pub. Year:
- 1987
- Page(from):
- 217
- Page(to):
- 222
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9780931837562 [0931837561]
- Language:
- English
- Call no.:
- M23500/77
- Type:
- Conference Proceedings
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