REACTIVE ION ETCHING OF MULTI-LAYER RESIST

REACTIVE ION ETCHING OF MULTI-LAYER RESIST

Author(s):

Publication title:

Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

76

Pub. Year:

1987

Page(from):

215

Page(to):

222

Pages:

8

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9780931837425 [0931837421]

Language:

English

Call no.:

M23500/76

Type:

Conference Proceedings

Details

TDL ID:	ZA00015561
Series ID:	PA00000011
Conf. info. (Name):	Symposium on science and technology of microfabrication
Conf. info. (Number):	1986
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1986.12.04-1986.12.05

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