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DEPOSITION OF a-Si FILMS USING SILANE MOLECULAR BEAMS EXCITED BY HEATED WIRE AND ArF LASER

Author(s):
Hanabusa, M.
Tsuboi, T.
Sato, T.
Furuno, S.
Iguchi, S.
Inoue, T.
1 more
Publication title:
Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
75
Pub. Year:
1987
Page(from):
209
Page(to):
216
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837418 [0931837413]
Language:
English
Call no.:
M23500/75
Type:
Conference Proceedings

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