Blank Cover Image

ION BEAM INDUCED AMORPHIZATION AND CRYSTALLIZATION PROCESSES IN SILICON AND GaAs

Author(s):
Publication title:
Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
74
Pub. Year:
1987
Page(from):
471
Page(to):
476
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837401 [0931837405]
Language:
English
Call no.:
M23500/74
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ION BEAN INDUCED REGROWTH IN GaAs

Johnson, S. T., Williams, J. S., Nygren, E., Elliman, R. G.

Materials Research Society
7 Conference Proceedings *CRYSTALLIZATION OF INDIUM IMPLANTYED AMORPHOUS SILICON

Nygren, E., Williams, J.S., Pogany, A., Elliman, R.G., Olson, G.L., McCallum, J.C.

Materials Research Society
2 Conference Proceedings MeV ION BEAM APPLICATIONS IN III-V SEMICONDUCTORS

Elliman, R.G., Ridgway, M.C., Johnson, S.T., Williams, J.S.

Materials Research Society
8 Conference Proceedings *THE KINETICS AND MICROSTRUCTURE OF ION BEAM INDUCED CRYSTALLIZATION OF SILICON

Williams, J. S., Brown, W. L., Elliman, R. G., Knoell, R. V., Maher, D. M., Seidel, T. E.

Materials Research Society
3 Conference Proceedings THE COMPETITION BETWEEN ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION AND AMORPHIZATION IN SILICON: THE ROLE OF THE DIVACANCY

Linnros, J., Elliman, R.G., Brown, W.L.

Materials Research Society
9 Conference Proceedings BEAM INDUCED CRYSTALLIZATION OF SILICON

Williams, J. S., Elliman, R. G., Brown, W. L., Seidel, T. E.

Materials Research Society
4 Conference Proceedings *KINETICS, MICROSTRUCTURE AND MECHANISMS OF ION BEAM-INDUCED EPITAXIAL CRYSTALLIZATION OF SEMICONDUCTORS

Elliman, R.G., Williams, J.S., Maher, D.M., Brown, W.L.

Materials Research Society
10 Conference Proceedings CHARACTERIZATION OF STRUCTURAL CHANGES AND DEFECTS IN ION BOMBARDED GaAs

Johnson, Stephen T., Williams, J. S., Elliman, R. G., Pogany, A. P., Nygren, E., Olson, G. L.

Materials Research Society
5 Conference Proceedings ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF GeXSi1-X/Si HETEROSTRUCTURES

Elliman, R.G., Ridgway, M.C., Williams, J.S.

Materials Research Society
11 Conference Proceedings ION BEAM PROCESSING OF GaAs AT ELEVATED TEMPERATURES

Williams, J. S., Elliman,. R. G, Johnson, S. T., Sengupta, D. K., Zemanski, J. M

Materials Research Society
6 Conference Proceedings ION-BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF NiSi2 AND CoSi2

Ridgway, M.C., Elliman, R.G., Williams, J.S.

Materials Research Society
12 Conference Proceedings ION-BEAM-INDUCED DAMAGING AND DYNAMIC ANNELAING PROCESSES IN SILICON

Short, K. T., Chivers, D. J., Elliman, R. G., Liu, J., Pogany, A. P., Wagenfeld, H. K., Williams, J. S.

North-Holland
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12