Blank Cover Image

PROPERTIES OF INDIUM TIN OXIDE FILMS PREPARED USING REACTIVE RF MAGNETRON SPUTTERING

Author(s):
Publication title:
Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
70
Pub. Year:
1986
Page(from):
569
Page(to):
576
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837364 [0931837367]
Language:
English
Call no.:
M23500/70
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Study of Annealed Indium Tin Oxide Films Prepared By rf Reactive Magnetron Sputtering

Meng, Li-jian, Macarico, A., Martins, R.

MRS - Materials Research Society
7 Conference Proceedings Properties of TCO-Films Prepared by Reactive Magnetron Sputtering

B. Szyszka

Society of Vacuum Coaters
2 Conference Proceedings Properties of Annealed Indium Tin Tantalum Oxide Films Prepared by Reactive Magnetron Sputtering

Zhang, Bo

Trans Tech Publications
8 Conference Proceedings Optical-Electrical Properties and Corrosion Behavior of Tantalum-Doped Indium Tin Oxide Films Deposited by Magnetron Sputtering

X.P. Dong, B. Zhang, J.S. Wu

Trans Tech Publications
3 Conference Proceedings The structural and electrochemical properties of tin oxide films prepared by RF magnetron sputtering

M. Cai, J. Song, L. Zhang, Q. Wu, S. Wu

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings Structure Effect on Electrical Properties of ITO Films Prepared by RF Reactive Magnetron Sputtering

Meng, Li-Jian, Santos, M. P. dos

MRS - Materials Research Society
4 Conference Proceedings Electrical and optical properties of indium tin oxide films prepared by pulsed magnetron sputtering

Chou,H.-W., Lee,W.J., Tsai,R.-Y., Fang,Y.K., Chen,C.C.

SPIE - The International Society for Optical Engineering
10 Conference Proceedings Electrical Properties of TaOx Thin Films for ReRAM Prepared by Reactive RF Magnetron Sputtering Method

Natsuki Fukuda, Hidenao Kurihara, Kazumasa Horita, Yoshiaki Yoshida, Yutaka Kokaze, Yutaka Nishioka, Koukou Suu

Materials Research Society
5 Conference Proceedings Properties of Indium Tin Oxide Deposited Using Reactive Closed Field Magnetron Sputtering

D.R. Gibson, I.T. Brinkley, G.H. Hall, E.M. Waddell, J.M. Walls

Society of Vacuum Coaters
11 Conference Proceedings Study on Indium Tin Oxide Films Deposited Using Different Conductive ITO Targets by DC Magnetron Sputtering

J.H. Park, S.C. Lee, G.H. Lee, P.K. Song

Trans Tech Publications
6 Conference Proceedings Influence of Al2O3 Buffer Layers on the Properties of Indium-Tin Oxide Films on PET Substrate by RF-Magnetron Sputtering

W. Tang, Y.P. Chao, Y.S. Fang, X.L. Weng, L.J. Deng

Trans Tech Publications
12 Conference Proceedings Characterization of RuO2 Films Prepared by RF Reactive Magnetron Sputtering

Meng, L-J., Santos, M. P. dos

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12