Blank Cover Image

QUANTITATIVE DISTRIBUTION ANALYSIS OF PHOSPORUS WITH SIMS IN THE LAYER SYSTEM SiO2/Si

Author(s):
Publication title:
Materials characterization : symposium held April 15-17, 1986, Palo Alto California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
69
Pub. Year:
1986
Page(from):
329
Page(to):
336
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9780931837357 [0931837359]
Language:
English
Call no.:
M23500/69
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A New Model of Anomalous Phosphorus Diffusion in Silicon

Budil,M., Potzl,H., Stingeder,G., Grasserbauer,M., Goser,K.

Trans Tech Publications
7 Conference Proceedings Electroluminescence in Si/SiO2 Layers.

Heikkila, L., Punkkinen, R., Hedman, H. -P.

Kluwer Academic Publishers
2 Conference Proceedings SIMULATION OF BURIED LAYER EXPERIMENTS CONTAIN- ING ALL FOUR DOPANT SPECIES

Ghaderi, K., Hobler, G., Budil, M., Poetzl, H., Pichler, P., Ryssel, H., Hansch, W., Eisele, I., Tian, C., Stingeder, G.

Electrochemical Society
8 Conference Proceedings The Photosynthetic Assimilation of Nitrate and its Interactions with CO2 Fixation

Lara C., Guerrero G. M.

Plenum Press
3 Conference Proceedings A Quantitative Correlation Between Inversion-Layer Mobility and Si/SiO2 Interface Roughness

Fang, S.J., Lin, H.C., Snyder, J.P., Helms, C.R., Yamanaka, T.

Electrochemical Society
9 Conference Proceedings Design of the quantitative analysis software system for myocardial contrast echocardiography

Zhang, M., Sun, F., Song, H., Liu, L., Mei, L., Zhai, G., Wang, C.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Hydrogen in Buried SiO2 Layers

Revesz, A.G., Stahlbush, R.E., Hughes, H.L.

Electrochemical Society
10 Conference Proceedings Cell image analysis and quantitative Cytology

Bartels H. P., Bibbo M., Olson G., Wied L. G.

Martinus Nijhoff Publishers
5 Conference Proceedings PECVD Induced Damage on Ultrathin SiO2 Layers

Cellere, G., Paccagnella, A., Valentini, M.G.

Electrochemical Society
11 Conference Proceedings LOW TEMPERATURE INTERLEVEL SiO2 LAYERS BY PHOTOINDUCED PROCESSING

Sigmund, H., Klumpp, A., Springholz, G.

Materials Research Society
6 Conference Proceedings Low-Temperature Formation of Ultrathin SiO2 Layers Using Direct Oxidation Method in a Catalytic Chemical Vapor Deposition System

Izumi, A., Sohara, S., Kudo, M., Matsumura, H.

MRS - Materials Research Society
12 Conference Proceedings Physical Properties of SiO2 Layers Deposited at Room Temperature by a Combination of ECR Plasma and High-Speed Jet of Silane

Isai, G., Holleman, J., Woerlee, P., Wallinga, H., Modreanu, M., Cobianu, C.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12